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The NPFLEX-1000 white light interferometry (WLI) system brings unprecedented flexibility, measurement capabilities, and performance to precision manufacturing industries aiming to understand and control manufacturing processes. The system is uniquely capable of handling nano- to macro-features effortlessly on samples of widely varying shapes and sizes. The instrument incorporates auto-focus and auto-illumination to eliminate the need to manually register the surface before each measurement.
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Specification
- Vertical Resolution: <0.01nm
- Lateral Resolution: 0.038 μm minimum (Sparrow criterion)
- Optical Resolution: 3.8μm (2.5X Interferometric Objective) / 2.2μm (5X) / 0.33μm (115X)
- Step Height: 0.75% accuracy
- RMS Repeatability: 0.004nm
- Camera: 1200x1000 high speed camera, 82fps, 6.9um sqr pixel, up to 120μm/sec scan speed
Automated roughness and surface texture measurements
- Corrosion monitoring
- Determine the ratio of peaks to valleys
- Understand the directionality of wear
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