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Max Tube Voltage : 160 kV
Max. Output Power : 15 W
Detail Detectability : < 0.75µm
Spatial Resolution : 1.5µm
Feature Recognition : 100nm
Min Focus-object-distance : 0.25mm
Geometric Magnification : up to 2.000x / 10.000x
Max. Object Size : 440mm x 540mm
Max. Inspection Area : 310nn x 310mm
Image Chain : Pixel size - 127µm; 1276 x 1276 pixel; Active area - 162mm x 162mm; Max. frame rate - 24 fps (1x1), 48 fps (2x2)
Image
Image
